QN Systems are designed specifically for the Nitride Etch process and are engineered for superior process performance and reliability. Imtec’s QN system uses an Aquaseal bath (with drain) for long bath life with an Integral collar with Teflon cooling coils. When combined with Imtec’s tight-sealing Autolid, an efficient vapor condensation system is created, which allows for precise control of temperature and acid concentration.
